Surface metrology is the measurement of small-scale features on surfaces, and is a branch of metrology. Surface primary form, surface waviness and surface roughness are the parameters most commonly associated with the field. It is important to many disciplines and is mostly known for the machining of precision parts and assemblies which contain mating surfaces or which must operate with high internal pressures.
Surface metrology is the study of surface geometry, also called surface texture or surface roughness. The approach is to measure and analyze the surface texture in order to be able to understand how the texture is influenced by its history, (e.g., manufacture, wear, fracture) and how it influences its behavior (e.g., adhesion, gloss, friction).
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A full list of standardized instruments can also be found in the part 6 document of the ISO series ISO 25178.
The following instruments are well established technologies. There are many manufacturers implementing these technologies into products:
Optical measurement instruments have some advantages over the tactile ones. The main advantages are:
Vertical scanning:
Horizonal scanning:
Because of every instrument has advantages and disadvantages the operator must choose the right instrument depending on the measurement application. In the following some advantages and disadvantages to the main technologies are listed:
The scale of the desired measurement will help decide which type of microscope will be used.
For 3D measurements, the probe is commanded to scan over a 2D area on the surface. The spacing between data points may not be the same in both directions.
In some cases, the physics of the measuring instrument may have a large effect on the data. This is especially true when measuring very smooth surfaces. For contact measurements, most obvious problem is that the stylus may scratch the measured surface. Another problem is that the stylus may be too blunt to reach the bottom of deep valleys and it may round the tips of sharp peaks. In this case the probe is a physical filter that limits the accuracy of the instrument.
The real surface geometry is so complicated that a finite number of parameters cannot provide a full description. If the number of parameters used is increased, a more accurate description can be obtained. This is one of the reasons for introducing new parameters for surface evaluation. Surface roughness parameters are normally categorised into three groups according to its functionality. These groups are defined as amplitude parameters, spacing parameters, and hybrid parameters.[3]
Parameters used to describe surfaces are largely statistical indicators obtained from many samples of the surface height. Some examples include:
Parameter | Name | Description | Type | Formula |
---|---|---|---|---|
Ra, Raa, Ryni | arithmetic average of absolute values | Mean of the absolute values of the profile heights measured from a mean line averaged over the profile | Amplitude | |
Rq, RRMS | root mean squared | Amplitude | ||
Rv | maximum valley depth | Maximum depth of the profile below the mean line with the sampling length | Amplitude | |
Rp | maximum peak height | Maximum height of the profile above the mean line within the sampling length | Amplitude | |
Rt | Maximum Height of the Profile | Maximum peak to valley height of the profile in the assessment length | Amplitude | |
Rsk | Skewness | Symmetry of the profile about the mean line | Amplitude | |
Rku | Kurtosis | Measure of the sharpness of the surface profile | Hybrid | |
RSm | Mean Peak Spacing | Mean Spacing between peaks at the mean line | Spatial |
This is a small subset of available parameters described in standards like ASME B46.1[4] and ISO 4287[5]. Most of these parameters originated from the capabilities of profilometers and other mechanical probe systems. In addition, new measures of surface dimensions have been developed which are more directly related to the measurements made possible by high-definition optical gauging technologies.
Most of these parameters can be estimated using the SurfCharJ plugin [1] for the ImageJ.
The surface roughness can also be calculated over an area. This gives Sa instead of Ra values. The ISO 25178 series describes all these roughness values in detail. The advantage over the profile parameters are:
Surfaces have fractal properties, multi-scale measurements can also be made such as Length-scale Fractal Analysis or Area-scale Fractal Analysis.[6]
To obtain the surface characteristic almost all measurements are subject to filtering.